Since the last millenium, serving research and industrial needs for positioning equipment for vacuum and cryogenic applications has been a key focus for PI miCos. These many years of expertise have yielded some of the most sophisticated design, manufacturing and support capabilities for the field available anywhere. A host of off-the-shelf and customized configurations are offered, as are highly configured integrated assemblies of multiaxis motion for environments to 10
-9 mbar. A small sampling is presented below.
In addition to having built impressive design and fabrication capabilities, PI miCos has deployed dedicated applications teams to support key fields, such as our recently-announced Beamline Instrumentation Group, which has its own field-specific website at
BeamlineInstrumentation.com. Also see our earlier post,
Little Motions for Big Physics.
Besides
the PI miCos positioning equipment currently hard at work on Mars, a host of more Earthly applications can benefit from these capabilities, including:
- Diffractometry
- Ellipsometry
- Particle beam instrumentation
- Synchrotron beamline equipment
- Microlithography
- Nanoimprint lithography
- E-beam, ion beam and Auger microscopy...
As high-vacuum applications continue to spread throughout the research and technology world, constant innovation and continuous improvement of design and manufacturing processes are needed just to keep up. Partnering with a source of acknowledged expertise will help your application be productive sooner and keep costs down. Have a tough vacuum positioning application? See our web resources and tutorials
here and
here, and consult your local PI miCos applications professional today.
| Ultra-High-Vacuum Rotation Stage with High Precision
- Reproducibility to 0.0002 deg (bidirectional)
- Rotational Velocity to 200 deg/second
- Payload to 50 kg
- Optional High Resolution Encoder
- Clear aperture up to 120 millimeters
|
| Ultra-High-Vacuum Positioning Table with Extreme Accuracy UPM-160 UHV
- Positioning Range to 205 millimeters (8 inches)
- Unidirectional Position Reproducibility to ±0.02 microns
- Max. Velocity 100 mm/second
- Payload to 35 kg
- Linear scale encoder (center mounted)
|
| Ultra-High-Vacuum Positioning Table LS-180-UHV
- Positioning Range to 508 millimeters (20 inches)
- Unidirectional Position Reproducibility to ±0.05 microns
- Max. Velocity 200 mm/second
- Payload to 100 kg
- Precision Limit Switches
- Available linear scale encoder (center-mount)
|
| High-Vacuum Positioning Table LS-110-UHV
- Positioning Range to 305 millimeters (12 inches)
- Unidirectional Position Reproducibility to ±0.05 microns
- Max. Velocity 90 mm/second
- Payload to 10 kg
- Precision Limit Switches
- Available linear scale encoder (center-mount)
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| High-Vacuum Precision Positioning Table PLS-85-HV
- Positioning Range to 155 millimeters (6 inches)
- Unidirectional Position Reproducibility to ±0.05 microns
- Max. Velocity 100 mm/second
- Payload to 10 kg
- Precision Limit Switches
- Available linear scale encoder
|
| Ultra-High-Vacuum Positioning Table MT-65-UHV
- Positioning Range to 155 millimeters (6 inches)
- Unidirectional Position Reproducibility to ±0.05 microns
- Max. Velocity 100 mm/second
- Payload to 10 kg
- Precision Limit Switches
- Available linear scale encoder
|
| High-Vacuum Micropositioning Stage MTS-65 HV
- Positioning Range to 52 millimeters (2 inches)
- Unidirectional Position Reproducibility to ±0.1 microns
- Max. Velocity 8 mm/second
- Payload to 2 kg
- Precision Limit Switches
- Available linear scale encoder
|
| Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV
- Positioning Range to 300 mm
- Unidirectional Position Reproducibility to ±0.2 microns
- Max. Velocity 20 mm/second
- Payload to 5 kg
- Precision Limit Switches
|
| Ultra-High-Vacuum Precision Actuator Pusher MP-20-L-UHV
- Positioning Range to 75 mm
- Unidirectional Position Reproducibility to ±0.5 microns
- Max. Velocity 3.5 mm/second
- Force max. 125 N
- Precision Limit Switches
- High resolution
- With MP-B & MP-F inserts
|
| Ultra-High-Vacuum Precision Linear Actuator MP-20-S-UHV
- Travel range 12.5 mm
- Unidirectional Position Reproducibility to ±1 microns
- Max. Velocity 3 mm/second
- Force max. 20 N
- Precision Limit Switches
- High resolution
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