PI miCos: A high density of solutions for the rarified world of vacuum

Since the last millenium, serving research and industrial needs for positioning equipment for vacuum and cryogenic applications has been a key focus for PI miCos.  These many years of expertise have yielded some of the most sophisticated design, manufacturing and support capabilities for the field available anywhere.  A host of off-the-shelf and customized configurations are offered, as are highly configured integrated assemblies of multiaxis motion for environments to 10-9 mbar.  A small sampling is presented below.

In addition to having built impressive design and fabrication capabilities, PI miCos has deployed dedicated applications teams to support key fields, such as our recently-announced Beamline Instrumentation Group, which has its own field-specific website at BeamlineInstrumentation.com. Also see our earlier post, Little Motions for Big Physics.

Besides the PI miCos positioning equipment currently hard at work on Mars, a host of more Earthly applications can benefit from these capabilities, including:
  • Diffractometry
  • Ellipsometry
  • Particle beam instrumentation
  • Synchrotron beamline equipment
  • Microlithography
  • Nanoimprint lithography
  • E-beam, ion beam and Auger microscopy...
As high-vacuum applications continue to spread throughout the research and technology world, constant innovation and continuous improvement of design and manufacturing processes are needed just to keep up.  Partnering with a source of acknowledged expertise will help your application be productive sooner and keep costs down.  Have a tough vacuum positioning application?  See our web resources and tutorials here and here, and consult your local PI miCos applications professional today.


Ultra-High-Vacuum Rotation Stage with High Precision
  • Reproducibility to 0.0002 deg (bidirectional)
  • Rotational Velocity to 200 deg/second
  • Payload to 50 kg
  • Optional High Resolution Encoder
  • Clear aperture up to 120 millimeters
Ultra-High-Vacuum Positioning Table with Extreme Accuracy UPM-160 UHV
  • Positioning Range to 205 millimeters (8 inches)
  • Unidirectional Position Reproducibility to ±0.02 microns
  • Max. Velocity 100 mm/second
  • Payload to 35 kg
  • Linear scale encoder (center mounted)
Ultra-High-Vacuum Positioning Table LS-180-UHV
  • Positioning Range to 508 millimeters (20 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 200 mm/second
  • Payload to 100 kg
  • Precision Limit Switches
  • Available linear scale encoder (center-mount)
High-Vacuum Positioning Table LS-110-UHV
  • Positioning Range to 305 millimeters (12 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 90 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder (center-mount)
High-Vacuum Precision Positioning Table PLS-85-HV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder
Ultra-High-Vacuum Positioning Table MT-65-UHV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder
High-Vacuum Micropositioning Stage MTS-65 HV
  • Positioning Range to 52 millimeters (2 inches)
  • Unidirectional Position Reproducibility to ±0.1 microns
  • Max. Velocity 8 mm/second
  • Payload to 2 kg
  • Precision Limit Switches
  • Available linear scale encoder
Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV
  • Positioning Range to 300 mm
  • Unidirectional Position Reproducibility to ±0.2 microns
  • Max. Velocity 20 mm/second
  • Payload to 5 kg
  • Precision Limit Switches
Ultra-High-Vacuum Precision Actuator Pusher MP-20-L-UHV
  • Positioning Range to 75 mm
  • Unidirectional Position Reproducibility to ±0.5 microns
  • Max. Velocity 3.5 mm/second
  • Force max. 125 N
  • Precision Limit Switches
  • High resolution
  • With MP-B & MP-F inserts
Ultra-High-Vacuum Precision Linear Actuator MP-20-S-UHV
  • Travel range 12.5 mm
  • Unidirectional Position Reproducibility to ±1 microns
  • Max. Velocity 3 mm/second
  • Force max. 20 N
  • Precision Limit Switches
  • High resolution

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